Nivo pwòpte lè a (N) | Limit maksimòm konsantrasyon nan patikil ki pi gran pase oswa egal a gwosè patikil ki make (kantite patikil lè/m3) | |||||
0.1um | 0.2um | 0.3um | 0.5um | 1.0um | 5.0um | |
ISO klas 1 | 10 | 2 | ||||
ISO klas 2 | 100 | 24 | 10 | 4 | ||
ISO klas 3 | 1,000 | 237 | 102 | 35 | 8 | |
ISO klas 4 | 10,000 | 2,370 | 1,020 | 352 | 83 | |
ISO klas 5 | 100,000 | 23,700 | 10,200 | 3,520 | 832 | 29 |
ISO klas 6 | 1,000,000 | 237,000 | 102,000 | 35,200 | 8,320 | 293 |
ISO klas 7 | 352,000 | 83,200 | 2,930 | |||
ISO klas 8 | 3,520,000 | 832,000 | 29,300 | |||
ISO klas 9 | 35,200,000 | 8,320,000 | 293,000 |
PCS/M≥0.5um | ISO 14644-1 (1999) | US 209E (1992) | US 209D (1988) | EEC cGMP (1989) | LAFRANS AFNOR(1981) | ALMANY VDI 2083 (1990) | JAPON JAOA (1989) |
1 | - | - | - | - | - | - | - |
3.5 | 2 | - | - | - | - | 0 | 2 |
10.0 | - | M1 | - | - | - | - | - |
35.3 | 3 | M1.5 | 1 | - | - | 1 | 3 |
100 | - | M2 | - | - | - | - | - |
353 | 4 | M2.5 | 10 | - | - | 2 | 4 |
1,000 | - | M3 | - | - | - | - | - |
3,530 | 5 | M3.5 | 100 | A+B | 4,000 | 3 | 5 |
10,000 | - | M4 | - | - | - | - | - |
35,300 | 6 | M4.5 | 1,000 | 1,000 | - | 4 | 6 |
100,000 | - | M5 | - | - | - | - | - |
353,000 | 7 | M5.5 | 10,000 | C | 400,000 | 5 | 7 |
1,000,000 | - | M6 | - | - | - | - | - |
3,530,000 | 8 | M6.5 | 100,000 | D | 4,000,000 | 6 | 8 |
10,000,000 | - | M7 | - | - | - | - | - |